The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
We report on the growth of highly c-axis-textured aluminum nitride (AlN) films sputtered on iridium layers for thin film bulk acoustic microresonator applications. Iridium films were evaporated on oxidized silicon covered with Ti or Mo/Ti seed layers to improve crystal quality and adhesion. The crystal quality of the AlN films as a function of the crystal structure of the iridium electrode and its...
InSb is a compound semiconductor which is used in many device applications. The use of native oxides as a dielectric layer in semiconductor devices has the advantages of being relatively free from contamination and the ease of growth as compared to the deposition of dielectric layers by other methods. Two methods of oxidation of InSb surfaces were tried, thermal and anodic oxidation. It was found...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.