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In this paper we present a new kind of high sensitivity chemo-mechanical sensors. These devices consist of a torsional conductive see-saw paddle suspended by two torsional springs from a substrate with symmetric electrodes under each paddle wing. One of the wings is coated with a thin chemically sensitive polymer layer that swells when a specific compound vapor is absorbed. The absorption induced...
Novel CMOS device is proposed as a biochemical sensor. We modified the basic architecture of an extended floating-gate field-effect transistor (FET) to be suited for VLSI applications. The FET has a floating-gate that is umbrella-shaped (UGFET), maximizing its charge sensing area in a much reduced transistor area. Compared to previous extended floating-gate structures, the UGFET shows improved scalability...
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