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A novel MEMS distributed phase shifter for D-band application is presented, in which the open-ended CPW lines in series with MEMS bridge provides exactly capacitance in order to optimize the instability caused by the MEMS bridge movement and meet the required loaded capacitance. The planar structure of open-ended CPW lines could enhance the reliability and avoid performance degradation because of...
This paper presents an new modeling method that RF MEMS device is divided into some typical structures, which can be considered as different transmission lines and be modeled respectively to get equivalent circuit model of the device by cascading. Applying the modeling method to DMTL, the equivalent circuit model and the relationship between model parameters and physical size are obtained after MEMS...
In the work, we proposed a new method to monitor the icing behavior. To this end, a sensor system based on the multi-electrode capacitance is used to measure the ice thickness in both lab and field investigations. It is demonstrated that such a system shows very promising applications for measurements of the ice thickness of river and sea. The experimental results can provide reliable data for studies...
The bimodality of upstream electromigration (EM) failures in the dual damascene structure of 45 nm Cu interconnection process with low-k material is investigated, and the improvement is demonstrated. Two major early failure modes with voids forming in via or at the chamfer of via-trench transition area are revealed and attributed to liner process weakness at the respective locations, which can be...
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