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Piezoelectrically actuated plano-convex thickness shear mode (TSM) resonators in lanthanum gallium silicate (langasite, LGS) were fabricated. As main fabrication steps a wet etching process and a dry etching process were developed and furthermore graytone-lithography in combination with photoresist melting has been applied. The plano-convex shape is necessary to improve the Q- factor of the devices...
Piezoelectrically actuated plano-convex thickness shear mode (TSM) resonators in lanthanum gallium silicate (langasite) were fabricated. As main fabrication steps a wet etching process and a dry etching process were developed and furthermore graytone-lithography in combination with photoresist melting has been applied. The plano-convex shape is necessary to improve the Q-factor of the devices. The...
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