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Wet and dry silica oxide layers have been treated thermally up to T a =1300°C and were investigated by cathodoluminescence (CL) spectroscopy. Whereas the dry oxides after high temperature treatment show an increase of the yellow–red spectra region, contrary, in wet oxides the UV–blue region is enhanced. Even a new strong band in the near-UV region (NV) at 330nm (3.76eV) is found for wet oxides...
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