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The design of piezoelectricaly actuated plano-convex shaped resonators has been studied to optimize their Q-factor and signal spectrum at high temperatures. The investigated arrays of thickness-shear-mode (TSM) resonators consist of langasite, a high temperature stable material. As viscoelastic damping and an increasing conductivity decreases the Q-factor at elevated temperatures, design optimizations...
The design of piezoelectrically actuated plano-convex shaped resonators has been studied to optimize their Q-factor and signal spectrum at high temperatures. The investigated arrays of thickness-shear-mode (TSM) resonators consist of langasite, a high temperature stable material. As viscoelastic damping and an increasing conductivity decreases the Q-factor at elevated temperatures, design optimizations...
The application of bulk acoustic resonators as gravimetric sensors enables high-temperature gas sensing provided that (1) the materials used withstand high temperatures and (2) the transducers are highly sensitive and selective. The former is realized by application of the high-temperature stable piezoelectric material langasite (La3Ga5SiO14). The focus of this work is the improvement of the sensitivity...
Piezoelectric sensors and actuators are a cost-effective and easy choice to drive MEMS (micro-electromechanical systems). Nevertheless piezoelectricity is not widely applied in commercial applications. One of the reasons is the incompatibility of standard MEMS processes and piezoelectric ceramics. To overcome these disadvantages this paper presents a technique to fabricate piezoelectric ceramic films...
The design of piezoelectrically actuated plano-convex shaped resonators in lanthanum gallium silicate (langasite, LGS) was investigated and improved by finite element simulations. Especially effects of shape and clamping were simulated. Further, devices that demonstrate the working principle have been fabricated. The membrane arrays have shown operating temperatures of more than 700degC and are applied...
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