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A photon-counting mode X-ray imaging device has a lot of interests, such as high-sensitivity and energy-discrimination. We have studied about photon-counting mode X-ray image sensor which was constructed with CdTe, and already developed for the line sensor. The imaging device that could detect X-rays by using Field Emitter Array (FEA) was proposed. The resolution of the image is decided by the spot...
We have demonstrated the novel CdTe X-ray imaging device that consists of a Schottky CdTe diode and a Vertical Thin Film Field Emitter Array (VTF-FEA). The Schottky CdTe diode was fabricated by deposied indium (In) thin film on a Cl-doped p-type (p-type) CdTe substrate and Sb2S3 on the opposite side of the CdTe substrate. VTF-FEA was fabricated by ion induced bending (IIB) and etch-back method. The...
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