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In this study, we present a facile strategy for the fabrication of Au/ZnO-hollow-sphere-monolayer thin films. ZnO hollow spheres were synthesized by a template technique based on polystyrene (PS). ZnO and Au nanoparticles (NPs) were simultaneously deposited by DC magnetron sputtering. The as-prepared ZnO spheres exhibit a hollow structure with an obvious contrast between the thin ZnO shell and the...
The (103)-oriented aluminum nitride (AlN) thin film is an attractive piezoelectric material for the applications in surface acoustic wave and film bulk acoustic wave resonator devices. In this work, we repot structural and mechanical characteristics of (103) AlN thin films deposited onto (100) Si substrates with radio frequency magnetron sputtering at different sputtering powers at 150, 250, and 350W...
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