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Radio frequency (rf) magnetron sputtering process was optimized to deposit highly conducting and transparent polycrystalline Al-doped ZnO (ZnO:Al or AZO) films at low temperature. Deposition was done in pure argon atmosphere on unheated glass substrates. Various properties of AZO films, such as residual stress, crystallite size, Al content, carrier concentration and mobility, resistivity, optical...
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