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ZnO-ZnMgO multiple quantum-well (MQW) thin-film waveguides with ridge structures have been fabricated on quartz substrates. Low-temperature deposition of high-quality ZnO-ZnMgO MQW thin films was achieved by filtered cathodic vacuum arc technique. A ridge is defined on the thin film by plasma etching. Room-temperature lasing with a peak wavelength at 378 nm of 1.5-nm well width was observed under...
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