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Electron-diffraction radial distribution function (RDF) was used as a structural probe to study the process of crystallization of Ge 2 Sb 2 Te 5 (GST) films annealed in situ. The GST thin film began to crystallize after a characteristic peak of 0.52nm appeared in the RDF, indicating the formation of third nearest neighbour ordering. The GST films preferentially form uniform...
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