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To demonstrate the capability of growing conductive interfaces through large-scale deposition, we deposited amorphous LaAlO3(LAO)/SrTiO3(STO) by using off-axis RF-sputtering. The LAO/STO thin film deposited within the 2.0-inch range exhibited conducting properties. To confirm the structural properties and ensure accurate characterization of the LAO/STO films prepared by using off-axis sputtering,...
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