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Further reduction of nonlinearity is demanded in RF SAW/BAW devices, but even their generation mechanisms have not been fully understood. Although phase possesses comparable information to amplitude, it has not been paid much attention in the nonlinear signal measurement. Nonlinear vector network analyzers (NVNAs) may be used for the purpose. However, NVNAs have limited linearity than spectrum analyzers...
This paper proposes a vector measurement method of nonlinear response generated in SAW/BAW devices. A cross domain analyzer, a spectrum analyzer with to input channels, is used to detect vector amplitude of very weak nonlinear signals. Second and third harmonics and intermodulation distortion signals were measured, and validity of the measurement was demonstrated.
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