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We report novel FETs with a structure in which not only the top surface but also the side surfaces of island-shaped c-axis aligned crystalline indium-gallium-zinc oxide (CAAC-IGZO) serving as a channel are surrounded by a gate electrode, that is, surrounded channel CAAC-IGZO FETs. The FETs maintained their favorable subthreshold characteristics even if the channel length was scaled down to approximately...
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