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We report the microfabrication of engineered colorimetric pressure-sensing particles (PSPs) suitable for pressure measurements within microfluidic environments. Each 18-μm diameter particle consists of a semi-transparent elastic shell enclosing a compressible reference vacuum cavity. The flexible shell and compressible cavity form an optical resonator that determines its color. The particle color...
The batch fabrication and test of artificial optical resonator slab-type micro particles (14 μm diameter, 0.7 μm gap) is presented as a means to map absolute pressure within microscopic environments. The pressure-sensing particles consist of a semi-transparent elastic polysilicon shell enclosing a reference vacuum cavity. The optical resonance frequency and the corresponding external pressure can...
We have fabricated and tested minimum sized (25times25 mum2) pneumatic valves that can be easily integrated within two-level PDMS microfluidic chips. Minimum valve footprint is achieved through the reduction of the valve gap (0-3 mum) and the incorporation of an anti-stiction teflon valve seat that prevents the bonding of the valve diaphragm during chip assembly. The pneumatic teflon-seated valves...
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