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Idea of a very short time annealing technology has evaluated in 1980s. Engineers tried to use Flash lamp, laser or some other lamps. In 1990s, W-halogen lamp annealing replaced furnace annealing in activation and silicidation process. Thermal budget has reduced from minutes to seconds. Eager for Milli-second Annealing (MSA) really came out in 2000s. Since dopant diffusion and an activation ratio have...
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