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Electrochemical impedance spectroscopy (EIS) and ex situ spectroscopic ellipsometry (SE) are applied to study the growth and etching of porous and barrier oxide layers formed during anodization of 99.5% aluminum and 0.5% copper films. The equivalent circuit, which includes two parallel combinations each containing a constant phase element (CPE) and a resistor (R) connected in series with the cell...
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