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Accurate model is indispensable for high precision control of gap-closing actuators driven by electromagnetic / electrostatic force. For these actuators, it is not easy to identify the precise model all along the motion range, because its mobility region is severely limited due to the pull-in instability. In this paper, an on-line identification method for gap-closing actuators is presented which...
Micro electro-mechanical systems (MEMS) are fabricated by applying semiconductor manufacturing technology. MEMS which integrate sensors and actuators are prospective in a wide field like automotives and medicines. The actuator integrated in MEMS often employs nonlinear forces like electromagnetic force and electrostatic force. For the gap closing actuators, it is known that pull-in instability due...
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