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We designed, fabricated, and experimentally demonstrated a dynamically balanced z-axis MEMS vibratory gyroscope utilizing the concentrated suspension architecture. This architecture allows for a high degree of structural symmetry (degeneracy of modes), potentially enabling high precision Rate Gyroscopes (RG) and Rate Integrating Gyroscopes (RIG). The full dynamic balance of the design is enabled by...
We report on a new design approach for X-Y symmetric resonator, that can be mechanized as rate (RG) or rate-integrating gyroscope (RIG), with a single digit as-fabricated frequency split between the two mechanical out-of-phase operational modes. We explore concentration of critical mechanical elements (shuttle-spring-anchor modules) close to the center of the die to mitigate the effect of the fabrication...
We've developed a novel low-noise frontend LSI architecture with chopper stabilization technique combined with noise shaping ADC at chopping frequency for a capacitive MEMS accelerometer. Key features of the architecture are (1) a doubly modulated differential carrier input to MEMS, (2) a 2nd order sigma-delta ADC having a notch in its noise transfer function (NTF) at chopping frequency, and (3) a...
MEMS liquid chromatography (LC) microchip with low dispersion and a low pressure drop turn structure was fabricated. In the turn structure, we used higher density pillar array at the inner side while lower density pillar array was used at the outer side to control inner and outer speed of a sample flow. An LC chip with an improved turn structure can obtain similar theoretical plate number (1233) compared...
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