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Niniejsza praca przedstawia wyniki badań elektrycznych oraz strukturalnych cienkich warstw (Ti-Cu)Ox wytworzonych metodą rozpylania magnetronowego z zaprogramowanym profilem rozkładu pierwiastków. Wytworzenie cienkich warstw zaplanowano tak, aby uzyskać gradientową zmianę koncentracji miedzi w funkcji grubości osadzonej warstwy o zadanym kształcie. Analiza składu materiałowego wykazała, że wytworzone...
The present paper contains a short discussion on possibilities and difficulties connected with fabrication of transparent oxide conductors and semiconductors for the use in transparent electronics. As an example the method of preparation of mixed (Ti-Cu)Ox thin films using multi-magnetron co-sputtering method together with basic research of their structure, optical and electrical properties have been...
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