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We present the fabrication and the testing of self sensing submicron thick piezoresistive cantilevers. Two kind of piezoresistive transducers (piezoresistor and MOSFET transistor) are integrated into the cantilever in the (100) direction, by n-type implantation (As). Cantilevers with both types of transducers are successfully fabricated, showing a yield of 100% and a standard deviation in the electrical...
We have fabricated 340 nm thick U-shaped microcantilevers with electrical output to be used as sensors for biomolecular detection, which requires a force resolution better than 100 pN. Piezoresistors or MOS transistors have been used as integrated electromechanical transducers. The devices have been fabricated by N-type doping using As ion implantation to obtain shallow junctions, and have been oriented...
This paper reports the development of piezoresistive microcantilevers for the detection of biomolecules by the measurement of intermolecular binding forces. The detection of the small forces involved in molecular recognition (<100 pN) requires cantilevers with a high force sensitivity and small spring constant. This can be obtained with cantilevers with submicron thickness and width in the micrometer...
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