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The scaling potential of patterned probe phase-change memory (PP-PCM) cells is investigated, down to single-nanometer dimensions, using physically realistic simulations that combine electrothermal modeling with a Gillespie Cellular Automata (GCA) phase-change model. For this study, a trilayer TiN/Ge2Sb2 Te5/TiN cell structure (isolated by an SiO2 insulator) was preferred, due to its good performance...
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