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Diamond like carbon (DLC) films have been fabricated by electron cyclotron resonance plasma enhanced chemical vapor deposition (ECR CVD). Low temperature (less than 70°C) fabrication of the DLC films, with a hardness of more than 3000 Hv and a high deposition rate of more than 80 nm/min, was achieved by applying a bias voltage during deposition to accelerate the ion impinging energy to the substrate...
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