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We propose an integer programming (IP) framework to undertake the dedicated photolithography machine constraint in semiconductor manufacturing. The constraint is one of the new challenges set by the process engineer in semiconductor manufacturing due to natural bias of photolithography machines. Previous researches either did not take the constraint into account or the proposed heuristic approach...
We present a multiagent scheduling (MS) system to tackle the dedicated machine constraint in this paper. The dedicated machine constraint is one of the new issues of the photolithography machinery due to natural bias. Natural bias will impact the alignment of patterns between different photolithography layers. The dedicated machine constraint is the most important challenge to improve productivity...
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