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Temperature characteristics of SU-8 photoresist coated love wave devices are presented from 0 °C to 120 °C. Surface skimming bulk wave (SSBW) and love wave delay line devices were fabricated on the ST-90°X quartz substrate. Effects of SU-8 thickness on insertion loss and temperature range of near-zero temperature coefficient of frequency (TCF) are investigated. Love wave devices with −15.5dB to −22...
Temperature characteristics of SiO2-coated Love Wave oscillators are presented from 10 °C to 60 °C. Surface skimming bulk wave (SSBW) and Love Wave delay line devices were fabricated on the 36 °YX-LiTaO3 substrate. Near zero TCF of SiO2-coated Love Wave oscillators from 10 °C to 60 °C are demonstrated in the 150MHz range. In the gas sensor experiment on dimethylmethylphosphonate (DMMP) detection,...
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