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Transparent conductive Ga-doped zinc oxide (ZnO:Ga) films with highly (002)-preferred orientation were deposited on glass substrates by DC reactive magnetron sputtering. Variation of structural, electrical, and optical properties with Ga content was investigated. The peak position of the (002) plane is linearly shifted to the lower 2θ value with the increase of Ga content. The lowest resistivity of...
P-type ZnO films with c-axis orientation deposited by DC reactive magnetron sputtering are first reported in this paper. ZnO films were prepared in NH 3 –O 2 atmosphere (ammonia concentration varied from 0% to 67%) with the substrate temperature in the range of 400–550°C. The properties were examined by X-ray diffraction, atomic force microscopy, Hall measurement, spreading resistance...
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