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We report on the influence of substrate thickness on the performance of antenna coupled microbolometers for terahertz (THz) detection. Planar antennas with NbsNó microbolometers were fabricated on silicon substrates. Detected voltages of these antenna-coupled microbolometers are altered with a periodic variation from 0.5 THz to 0.75 THz, which is accorded with the reflection of the substrate. By placing...
Based on Nb5N6 thin film, whose temperature coefficient of resistance is as high as -0.7% /K at room temperature, bolometer integrated with a planar bow-tie antenna has been designed and fabricated for detecting THz signal without the need to cool the bolometer itself. The best attainable electrical responsivity of the bolometer is about -400 V/W at a current bias of 0.4 mA. The electrical NEP is...
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