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High-frequency ESR technique using a microcantilever is reported. In our technique, an electromagnetic wave is irradiated at a sample-mounted cantilever via oversized waveguide, and ESR absorption is mechanically detected as a change of magnetic torque of the sample. The estimated spin sensitivity was 109 spins/G at 80 GHz. We also demonstrate multi-frequency ESR measurement of a µm-size sample at...
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