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A new approach of strain mapping is proposed with scanning transmission electron microscopy and applied to strained MOSFETs for the first time. This technique is extended to quantitative measurement with sub-nano meter spatial resolution combining with nano-beam diffraction. As a result, two-dimensional strain mapping with sub-nano meter spatial resolution is obtained and actual strain at inversion...
There is increasing demand for oxide-dispersion-strengthened ferritic alloys that possess both high-temperature strength and irradiation resistance. Improvement of the high-temperature properties requires an understanding of the operative deformation mechanisms. In this study, the microstructures and creep properties of the oxide-dispersion-strengthened alloy 14YWT have been evaluated as a function...
The time evolution of graphitization was analyzed based on the structural and magnetic properties of nanodiamond samples annealed at 1600°C for various time intervals. High resolution TEM and XRD show that the nanodiamond particles are converted to spherical onions for short annealing time intervals, and then they are completely transformed to polyhedral nanographite through the annealing for 120min...
Self-formed MnOx barrier technology has been successfully integrated for 150nm pitch Cu dual-damascene interconnects with PAr/SiOC (k=2.65) hybrid structure. Barrier formation at the interface of Cu and various low-k films with few Si or O was confirmed by adhesion, XPS and TEM/EDX analyses. No degradation of interconnect performance and excellent electromigration lifetime were verified. It is concluded...
Here we describe synthesis of very unusual multi-walled carbon nanotubes through a catalytic chemical vapor deposition method using a floating reactant method and subsequent thermal treatment up to 2600°C in a large quantity. Main characteristics of these nanotubes are (1) relatively wide distribution of diameters ranging from 20 to 70nm and linear, long macro-morphology (aspect ratio >100), (2)...
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