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We propose a photo-electron emitter structure whose electron beam size is 20 nm using CsBr photo-emission layer and a novel nano-optical antenna structure. The optical spot size of 20 nm has been experimentally demonstrated.
We describe an algorithm that can achieve exact self-calibration for high-precision two-dimensional (2-D) metrology stages. Previous attempts to solve this problem have often given nonexact or impractical solutions. Self-calibration is the procedure of calibrating a metrology stage by an artifact plate whose mark positions are not precisely known. By assuming rigidness of the artifact plate, this...
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