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We have developed a diamond SAW resonator capable of over 3 GHz using a SiO2/IDT/AlN/diamond structure. The structure enables a thicker Al-IDT and a lower series resistance for the SAW resonator based on FEM calculation results. These attributes lead to low insertion loss for SAW devices over 3 GHz compared to SiO2/IDT/ZnO/diamond structures. A 2port 6.4 GHz resonator was fabricated and has successfully...
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