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Europium ions of 70 keV energy were implanted at room temperature in SrTiO 3 single crystals with a fluence of 5 × 10 16 ions cm −2 . The damage and the site locations of cations in the implanted layer were investigated by Rutherford backscattering spectrometry in channeling geometry. The oxidation states of the involved atomic species along the Eu distribution profile were...