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Molecular layer deposition (MLD) technique can be used for preparation of various organic–inorganic nanohybrid superlattices at a gas-phase. The MLD method is a self-controlled layer-by-layer growth process under vacuum conditions, and is perfectly compatible with the atomic layer deposition (ALD) method. In this paper, we fabricated a new type organic–inorganic nanohybrid thin film using MLD method...
We report a low-temperature fabrication of mixed-organic–inorganic nanohybrid superlattices for high-k thin stable gate dielectrics on flexible substrates. The self-assembled organic layers (SAOLs) were grown by repeated sequential adsorptions of CC-terminated alkylsilane and metal (Al or Ti) hydroxyl with ozone activation, which was called “molecular layer deposition (MLD)”. The MLD method is a self-controlled...
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