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Self-supported SiO2 structures were fabricated from thermal SiO2/Si substrates by combining FIB direct writing and selective and anisotropic chemical wet etching of silicon. These structures, such as SiO2 overhangs on the edges of Si trenches, were then used as templates for ALD of Ta2O5 to form sealed nanochannels and cavities. The size of trenches formed by etching through openings in the SiO2 increases...
Significant enhancement in SERS response from periodic and aperiodic arrays of nanowires coated with silver by atomic layer deposition was observed in comparison to other deposition methods. SERS detection at 10 meters was also observed.
This paper presents the application of vapor-phase DDMS (dichlorodimethylsilane) self-assembled monolayer (SAM) coating which significantly reduced stiction behavior in optical MEMS components exposed to humidity. Previously SAMs have been deposited in liquid form, making them unsuitable for application in high aspect ratio MEMS/NEMS structures; now vapor-phase SAM deposition is a novel option for...
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