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SnO 2 thin films were grown on silica glass substrates using the pulsed laser deposition (PLD) method, and their structures, electric properties, and sensor performances were examined to investigate the sensing mechanism of thin-film gas sensors. Single-phase SnO 2 films with rutile-type structures were obtained at 650°C. All the SnO 2 films had many columnar grains, and the...
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