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This paper introduces three-type voice coil motors (VCMs) for nano-positioning system. These VCMs all consists dual-magnet stator and coil mover which is sandwiched between these two-layer magnets with different topology structures of the stators and movers. The motor structures, magnetic field distribution, thrust force and force ripple of these VCMs are studied and compared. Equivalent magnetic...
This paper proposes a novel moving-coil voice coil motor(VCM) used for driving nano-positioning device. This VCM implements bilateral Halbach array permanent magnet as the stator and three separated coils with the slotted coil skeleton as the mover. The VCM can achieve large stroke and nano-level positioning accuracy with the support of the compliant mechanism. Equivalent magnetic circuit method and...
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