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The catalytic performance of porous silicon (PS) micro enzyme reactors (μIMER) is strongly dependent on the PS matrix morphology for enzyme immobilisation. PS was achieved in the μIMER by anodisation in a HF-ethanol mixture. PS etching of structured silicon surfaces commonly results in an inhomogeneous pore formation. The deep channel microreactors described herein have previously suffered from these...
AbstractThe influence of the carrier matrix depth was investigated for porous silicon enzyme reactors. For the experiments, <110> oriented silicon, p-type (2070cm), was used. Porous silicon was generated on planar surfaces and on anisotropically pre-etched high aspect-ratio parallel channel reactors. For each type of sample the porous silicon layer was generated for three depths, controlled...
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