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Ultra-precision active vibration isolation system protects ultra-precision equipment from the transmission of external vibration, and suppresses vibration incurred by internal structures. In order to obtain the ideal skyhook effect, the sliding mode controller with adaptive feedforward compensator is proposed in this paper. With the controller, the vibration system can obtain the desire performance...
This paper presents the dynamic modelling and control of a six degree-of-freedom (DOF) active vibration isolation system for high-precision equipment. First, the six DOF rigid body model of the system is developed. Then, the hybrid controller which is a combination of the feedback controller with the nonmodel based adaptive feedforward compensator is proposed. The feedback controller is based on absolute...
Precision motion stage with multi-DOFs is a key component of integrated circuit fabrication equipment and high performance machining tool. Its accuracy decided by the precision of transfer function impacts directly on the equipment performances. Its order and parameters determination are key questions for transfer function identification. System transfer function model is established by using additional...
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