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A novel chemical-resistant ion-selective field-effect transistor (ISFET) array is introduced; using amorphous diamond-like carbon (DLC) films for passivation and as pH-sensitive layer. A DLC coating technology is developed, useful for depositing and patterning final thin films on active and passive surfaces of ISFET devices. The DLC films are produced by a low-temperature dual rf methane-helium gas...
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