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A simulation methodology dealing with the complexity of multiphysical micro electro mechanical system (MEMS) models and their evaluation according to RF specification is presented. It is focused towards the evaluation of a hybrid MEMS-CMOS RF oscillator prior to its realization, based on the demodulation performance of a long-term evolution (LTE) user equipment (UE). The proposed multiphysical simulation...
In this paper, the design of a RF MEMS oscillator on a silicon-ceramic composite substrate using a high-Q Lamb-wave resonator as frequency-selective device is described. The MEMS resonator is designed on a 1.8 µm thick piezoelectric AlN layer, deposited on silicon using thin-film processes. The finite-element simulation results of the resonator structure are presented, and the derivation of the electrical...
A fast identification method of membrane structure parameters is investigated for an early stage of the manufacturing process. The approach consists of performing optical measurement of the modal responses of the membrane structures. This information is used in an inverse identification algorithm based on a FE model. Device characteristics can be determined by measured modal frequencies which are...
High piezoelectric coupling coefficients of PZT-based material systems can be employed for actuator functions in micro-electro-mechanical systems (MEMS) offering displacements and forces which outperform standard solutions. This paper presents simulation, fabrication, and development results of a stress-compensated, PZT-coated cantilever concept in which a silicon bulk micromachining process is used...
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