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The effect of device fabrication temperature on the work function of ruthenium (Ru) metal gate and its bilayers was investigated. The work function shows strong temperature dependence when Ru electrodes are deposited on silicon oxide, SiO 2 , but not on hafnium silicates (HfSiO x ). Specifically, the work function of Ru on SiO 2 increased from 4.5 eV at 500 °C to 5.0 eV at...
We have investigated the growth mechanism of ALD-TiN film on different dielectrics and the resulting effective work function value. TiN nucleation rate and growth rate are found to be dependent on the dielectric films. TiN growth mechanism changed from 3-D type on SiO 2 to layer-by-layer type on HfO 2 . The minimum TiN thickness required for a complete surface coverage varies according...
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