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X-ray diffraction (XRD) measurements of Φ scan in different χ angle in skew geometry for GaN films have shown that the peak widths of Φ scan decrease with the increment of angle χ. The FWHM of ω scan also increases with the inclination angle and reaches to be equal until the reflection plane is perpendicular to the surface of the sample. Based on these measured results, we developed a method to determine...
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