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The rational of incorporating material reuse considerations into modular design has been well recognized. The key technical challenge, however, lies in that such material reuse modularity must be consistent with and conform to the legacy structure of a technical system. This paper is geared towards a total system approach and introduces a game theoretic approach to joint optimization of technical...
Hydrostatic stress of Cu damascene interconnects was calculated by using finite element method in the present work. The analytical work was performed to examine the distribution of hydrostatic stress and the effect of different line width in the Cu interconnects. Then a model of atomic diffusion was presented and used to calculate the size of stress-induced voiding according to result of hydrostatic...
Although Fiber Bragg gratings (FBGs) have previously been employed for structural health monitoring of wind turbine blades, they were mainly used for measuring the vibration pattern and strain levels. No attempt has been made to monitor the occurrence and in particular to locate Foreign object impact (FOI) on blades. By using an improved energy modulation interrogation technique we showed that short...
Hydrostatic stress of Cu damascene interconnects were calculated by using commercial finite element software in the present work. The analytical work was performed to examine the distribution of hydrostatic stress and the effect of different low-k dielectrics and barrier materials in the Cu interconnects. The results indicate that the hydrostatic stress is strongly dependent upon different low-k dielectrics...
Applications of a novel epoxy based dry film photoresist, PerMX3000, have been investigated in this work in case of 3D structure architecture, micro-fluid tunnel, and wafer surface molding. For different package level requirements, such material provides high resolution patterning ability for narrow pitch layout design; controllable side wall shape from positive slope to negative slope; good adhesion...
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