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The next generation of applications in integrated microwave photonics[1], such as optical beam forming networks or programmable photonic processors[2], requires complex chip designs with hundreds or even thousands of actuators and low propagation losses. While passive material platforms such as silicon nitride possess ultra-low losses in the telecommunication C-Band, today their on-chip phase actuation,...
This paper presents a novel design for a 4 degree of freedom pneumatically-actuated upper-limb rehabilitation device. BONES is based on a parallel mechanism that actuates the upper arm by means of two passive, sliding rods pivoting with respect to a fixed structural frame. Four, mechanically-grounded pneumatic actuators are placed behind the main structural frame to control shoulder motion via the...
Magnetically driven linear micro-actuators with 1 mN output force and hundreds of microns of total travel have been realized using LIGA-like processing techniques. These devices are driven at resonance frequencies of around 350 Hz and exhibit quality factors of about 300 in air. Exploiting wire-wound electromagnets, 300 μm resonant displacements have been demonstrated with drive signal currents of...
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