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Quaternary TiZrAlN nanocomposite thin films with a composition of 20.7Ti–22.2Zr–2.7Al–54.4N (at.%) were deposited by the closed-field unbalanced magnetron sputtering (CFUBMS) method and oxidized in air at temperatures between 500 and 700 °C. The oxides formed were TiO 2 , ZrO 2 , and Al 2 O 3 . The films had inferior oxidation resistance because the amounts of ZrO ...
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