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In present paper, the fabrication and humidity sensing properties of aluminum phthalocyanine chloride (AlPcCl) thin film based sensors have been presented. AlPcCl thin films with nominal thickness of 50–100nm are deposited on glass substrates between pre-deposited 50nm thick aluminum electrodes. The gap between the electrodes is 50μm. It is observed that the sensing mechanism is based on the variation...
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