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Design rule has been a primary metric to link design and technology, and is likely to be considered as IC manufacturer's role for the generation due to the empirical and unsystematic in nature. Disruptive and radical changes in terms of layout style, lithography and device in the next decade require the design rule evaluation in early development stage. In this paper, we explore VLSI CAD researches...
In this paper we propose a new equivalent contact resistance model which accurately calculates contact resistances from contact area, contact position, and contact shape. Based on the impact of contact resistance on the saturation current, we perform robust S/D contact layout optimization by minimizing the lithography variation as well as by maximizing the saturation current without any leakage penalty...
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