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AlCrSiON coatings with a 0–48at.% oxygen addition were deposited by arc ion plating process in an Ar–N2–O2 mixture atmosphere. The influence of varying oxygen content on elemental compositions, microstructure, residual stress, and mechanical properties of the AlCrSiON coatings was investigated. The results indicate that the oxygen content increases from 0 to 48at.% with increasing the flow ratio O...
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