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A highly sensitive piezoelectric ultrasonic micro-sensor with a grooved multilayer membrane was developed by a Si-based MEMS technique. The groove was located at one-quarter of the distance away from the edge of the membrane and opened into piezoelectric layer. The piezoelectric layer Pb(Zr,Ti)O3 (PZT) was 2.2 mum thick and was prepared by a sol-gel method. The prepared PZT film was pure perovskite...
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