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Atomic force microscope (AFM) is equipped with height recognition with nano and sub-nano meter scale, and it can accurately build three-dimensional (3D) imaging of samples with micro-structure. In this paper, we propose a homemade phase-detection mode atomic force microscopy (PM-AFM). In measuring system, here we use a compact CD/DVD pick-up-head to measure the cantilever deflection. In scanning system,...
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